Publication:
Simulation of a MEMS piezoelectric energy harvester

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dc.citedby3
dc.contributor.authorMd Ralib A.A.en_US
dc.contributor.authorNurashikin Nordin A.en_US
dc.contributor.authorSalleh H.en_US
dc.contributor.authorid36537608500en_US
dc.contributor.authorid7005958999en_US
dc.contributor.authorid24067645400en_US
dc.date.accessioned2023-12-29T07:49:23Z
dc.date.available2023-12-29T07:49:23Z
dc.date.issued2010
dc.description.abstractThe growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare� to obtain the device at resonance frequency, output voltage and optimum dimensions. � 2010 EDA Publishing/DTIP.en_US
dc.description.natureFinalen_US
dc.identifier.ArtNo5486470
dc.identifier.epage181
dc.identifier.scopus2-s2.0-77957855178
dc.identifier.spage177
dc.identifier.urihttps://www.scopus.com/inward/record.uri?eid=2-s2.0-77957855178&partnerID=40&md5=52c6285363c04b5b9aca850db03746fb
dc.identifier.urihttps://irepository.uniten.edu.my/handle/123456789/30554
dc.pagecount4
dc.sourceScopus
dc.sourcetitleSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
dc.subjectCantilever beam
dc.subjectEnergy harvesting
dc.subjectInterdigitated electrodes
dc.subjectPiezoelectric
dc.subjectAtomic force microscopy
dc.subjectCantilever beams
dc.subjectDesign
dc.subjectElectrodes
dc.subjectHarvesters
dc.subjectNanocantilevers
dc.subjectPiezoelectricity
dc.subjectPile foundations
dc.subjectPlatinum
dc.subjectResonance
dc.subjectZinc oxide
dc.subjectAt resonance
dc.subjectConventional batteries
dc.subjectCoventorWare
dc.subjectDesign and simulation
dc.subjectEnergy Harvester
dc.subjectEnvironmental-friendly
dc.subjectFinite element simulations
dc.subjectGrowing demand
dc.subjectInter-digitated electrodes
dc.subjectLong lasting
dc.subjectOptimum dimensions
dc.subjectOutput voltages
dc.subjectPiezoelectric
dc.subjectPiezoelectric cantilever beams
dc.subjectPiezoelectric energy
dc.subjectPiezoelectric layers
dc.subjectPortable electronic devices
dc.subjectPt electrode
dc.subjectSilicon substrates
dc.subjectZnO
dc.subjectEnergy harvesting
dc.titleSimulation of a MEMS piezoelectric energy harvesteren_US
dc.typeConference paperen_US
dspace.entity.typePublication
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