Publication: Simulation of a MEMS piezoelectric energy harvester
Date
2010
Authors
Md Ralib A.A.
Nurashikin Nordin A.
Salleh H.
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Abstract
The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare� to obtain the device at resonance frequency, output voltage and optimum dimensions. � 2010 EDA Publishing/DTIP.
Description
Keywords
Cantilever beam , Energy harvesting , Interdigitated electrodes , Piezoelectric , Atomic force microscopy , Cantilever beams , Design , Electrodes , Harvesters , Nanocantilevers , Piezoelectricity , Pile foundations , Platinum , Resonance , Zinc oxide , At resonance , Conventional batteries , CoventorWare , Design and simulation , Energy Harvester , Environmental-friendly , Finite element simulations , Growing demand , Inter-digitated electrodes , Long lasting , Optimum dimensions , Output voltages , Piezoelectric , Piezoelectric cantilever beams , Piezoelectric energy , Piezoelectric layers , Portable electronic devices , Pt electrode , Silicon substrates , ZnO , Energy harvesting