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Effects of anodisation parameters on thin film properties: a review

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dc.citedby4
dc.contributor.authorWong Y.H.en_US
dc.contributor.authorAffendy M.G.en_US
dc.contributor.authorLau S.K.en_US
dc.contributor.authorTeh P.C.en_US
dc.contributor.authorLee H.J.en_US
dc.contributor.authorTan C.Y.en_US
dc.contributor.authorRamesh S.en_US
dc.contributor.authorid36605495300en_US
dc.contributor.authorid55260141000en_US
dc.contributor.authorid57193418930en_US
dc.contributor.authorid57193423703en_US
dc.contributor.authorid57190622221en_US
dc.contributor.authorid16029485400en_US
dc.contributor.authorid41061958200en_US
dc.date.accessioned2023-05-29T06:38:46Z
dc.date.available2023-05-29T06:38:46Z
dc.date.issued2017
dc.descriptionCMOS integrated circuits; Metallic compounds; Metals; MOS devices; Oxide semiconductors; Temperature; Thin films; Anodisation; Anodising; Applied voltages; Complementary metal oxide semiconductors; Metal oxide film; Nano-structured; Thickness; Thin-film properties; Oxide filmsen_US
dc.description.abstractElectrochemical anodisation is a well-received method in the complementary metal-oxide-semiconductor field as it is advantageous; best performed at room temperature which translates into being more affordable and a simple alternative to form nano-structured oxide films for different metals. The quintessential parameters involved allow numerous formations of metal oxide films according to desired morphology and thickness. Therefore, this paper aims to review the effects of anodising parameters such as applied voltage, concentration, temperature, time, current density and post-anodisation annealing among them. � 2016 Institute of Materials, Minerals and Mining.en_US
dc.description.natureFinalen_US
dc.identifier.doi10.1080/02670836.2016.1193654
dc.identifier.epage711
dc.identifier.issue6
dc.identifier.scopus2-s2.0-85013768498
dc.identifier.spage699
dc.identifier.urihttps://www.scopus.com/inward/record.uri?eid=2-s2.0-85013768498&doi=10.1080%2f02670836.2016.1193654&partnerID=40&md5=ff7cac4b55c2dd86c31296dbcdb0fc34
dc.identifier.urihttps://irepository.uniten.edu.my/handle/123456789/23249
dc.identifier.volume33
dc.publisherTaylor and Francis Ltd.en_US
dc.sourceScopus
dc.sourcetitleMaterials Science and Technology (United Kingdom)
dc.titleEffects of anodisation parameters on thin film properties: a reviewen_US
dc.typeReviewen_US
dspace.entity.typePublication
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