Publication:
Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progress

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dc.citedby3
dc.contributor.authorNur-E-Alam M.en_US
dc.contributor.authorMaurya D.K.en_US
dc.contributor.authorYap B.K.en_US
dc.contributor.authorRajabi A.en_US
dc.contributor.authorDoroody C.en_US
dc.contributor.authorBin Mohamed H.en_US
dc.contributor.authorKhandaker M.U.en_US
dc.contributor.authorIslam M.A.en_US
dc.contributor.authorKiong Tiong S.en_US
dc.contributor.authorid57197752581en_US
dc.contributor.authorid56715372600en_US
dc.contributor.authorid26649255900en_US
dc.contributor.authorid56622591700en_US
dc.contributor.authorid56905467200en_US
dc.contributor.authorid58645199000en_US
dc.contributor.authorid36836773700en_US
dc.contributor.authorid57657507100en_US
dc.contributor.authorid57219799117en_US
dc.date.accessioned2024-10-14T03:17:32Z
dc.date.available2024-10-14T03:17:32Z
dc.date.issued2023
dc.description.abstractIn the last several decades, metal oxide thin films have attracted significant attention for the development of various existing and emerging technological applications, including pH sensors. The mandate for consistent and precise pH sensing techniques has been increasing across various fields, including environmental monitoring, biotechnology, food and agricultural industries, and medical diagnostics. Metal oxide thin films grown using physical vapor deposition (PVD) with precise control over film thickness, composition, and morphology are beneficial for pH sensing applications such as enhancing pH sensitivity and stability, quicker response, repeatability, and compatibility with miniaturization. Various PVD techniques, including sputtering, evaporation, and ion beam deposition, used to fabricate thin films for tailoring materials� properties for the advanced design and development of high-performing pH sensors, have been explored worldwide by many research groups. In addition, various thin film materials have also been investigated, including metal oxides, nitrides, and nanostructured films, to make very robust pH sensing electrodes with higher pH sensing performance. The development of novel materials and structures has enabled higher sensitivity, improved selectivity, and enhanced durability in harsh pH environments. The last decade has witnessed significant advancements in PVD thin films for pH sensing applications. The combination of precise film deposition techniques, novel materials, and surface functionalization strategies has led to improved pH sensing performance, making PVD thin films a promising choice for future pH sensing technologies. � 2023 by the authors.en_US
dc.description.natureFinalen_US
dc.identifier.ArtNo8194
dc.identifier.doi10.3390/s23198194
dc.identifier.issue19
dc.identifier.scopus2-s2.0-85174070058
dc.identifier.urihttps://www.scopus.com/inward/record.uri?eid=2-s2.0-85174070058&doi=10.3390%2fs23198194&partnerID=40&md5=0e4271d7e41d2ac176f3deecd87c83e4
dc.identifier.urihttps://irepository.uniten.edu.my/handle/123456789/33969
dc.identifier.volume23
dc.publisherMultidisciplinary Digital Publishing Institute (MDPI)en_US
dc.relation.ispartofAll Open Access
dc.relation.ispartofGold Open Access
dc.sourceScopus
dc.sourcetitleSensors
dc.subjectmetal oxide
dc.subjectpH sensor
dc.subjectsensitivity
dc.subjectthin film
dc.subjectAgriculture
dc.subjectDiagnosis
dc.subjectIon beams
dc.subjectMorphology
dc.subjectOxide films
dc.subjectpH
dc.subjectpH sensors
dc.subjectPhysical vapor deposition
dc.subjectMetal oxide thin films
dc.subjectMetal-oxide
dc.subjectNovel materials
dc.subjectpH sensing
dc.subjectPhysical vapor deposited
dc.subjectPhysical vapour deposition
dc.subjectSensing applications
dc.subjectSensing performance
dc.subjectSensitivity
dc.subjectThin-films
dc.subjectThin films
dc.titlePhysical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progressen_US
dc.typeReviewen_US
dspace.entity.typePublication
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