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A comparative study on MEMS piezoelectric microgenerators

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dc.citedby24
dc.contributor.authorRalib A.A.M.en_US
dc.contributor.authorNordin A.N.en_US
dc.contributor.authorSalleh H.en_US
dc.contributor.authorid36537608500en_US
dc.contributor.authorid7005958999en_US
dc.contributor.authorid24067645400en_US
dc.date.accessioned2023-12-29T07:51:34Z
dc.date.available2023-12-29T07:51:34Z
dc.date.issued2010
dc.description.abstractThe growing demand of wireless sensor networks has created the necessity of miniature, portable, long lasting and easily recharged sources of power. Traditional, hazardous batteries are rendered unacceptable and the viability of 'green' MEMS energy harvesters has become even more dominant. This paper reviews the state-of-theart MEMS piezoelectric energy harvesters which promise a cleaner environment and eliminate the disposal issue of conventional batteries. Piezoelectric devices are the perfect candidate for implementation in micro generators as they are easily fabricated, are silicon compatible and demonstrate high efficiencies for mechanical to electrical energy conversion. The characteristic equations which govern the conversion of mechanical vibration to electrical power are described in this paper. The typical operating modes for MEMS piezoelectric energy cantilevers which are namely; d31 and d33 are also detailed. Criteria for optimum material suitable for MEMS energy scavengers to produce maximum power output are also outlined. Several MEMS energy harvesters which have been successfully fabricated and tested are also critically reviewed in this paper. Finally a comparison table highlighting the advantages and disadvantages of each work is presented. � Springer-Verlag 2010.en_US
dc.description.natureFinalen_US
dc.identifier.doi10.1007/s00542-010-1086-9
dc.identifier.epage1681
dc.identifier.issue10
dc.identifier.scopus2-s2.0-78149407459
dc.identifier.spage1673
dc.identifier.urihttps://www.scopus.com/inward/record.uri?eid=2-s2.0-78149407459&doi=10.1007%2fs00542-010-1086-9&partnerID=40&md5=53d4a3ef45f2af1811b83972e8f095e6
dc.identifier.urihttps://irepository.uniten.edu.my/handle/123456789/30702
dc.identifier.volume16
dc.pagecount8
dc.sourceScopus
dc.sourcetitleMicrosystem Technologies
dc.subjectEnergy conversion
dc.subjectHarvesters
dc.subjectPiezoelectric devices
dc.subjectPiezoelectricity
dc.subjectVibrations (mechanical)
dc.subjectCharacteristic equation
dc.subjectComparative studies
dc.subjectConventional batteries
dc.subjectElectrical energy
dc.subjectElectrical power
dc.subjectEnergy Harvester
dc.subjectEnergy scavenger
dc.subjectGrowing demand
dc.subjectHigh efficiency
dc.subjectLong lasting
dc.subjectMaximum power output
dc.subjectMechanical vibrations
dc.subjectMicrogenerators
dc.subjectOperating modes
dc.subjectPiezoelectric energy
dc.subjectWireless sensor networks
dc.titleA comparative study on MEMS piezoelectric microgeneratorsen_US
dc.typeReviewen_US
dspace.entity.typePublication
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