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Design and fabrication of a quasi-ordered nanoporous silicon membrane suitable for thermally induced drug release

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dc.citedby11
dc.contributor.authorChau C.F.en_US
dc.contributor.authorMelvin T.en_US
dc.contributor.authorid25824209000en_US
dc.contributor.authorid56236436100en_US
dc.date.accessioned2023-12-29T07:46:14Z
dc.date.available2023-12-29T07:46:14Z
dc.date.issued2012
dc.description.abstractThe design and fabrication of an ordered nanoporous silicon membrane and integrated heater and temperature sensor is described. The methodology for fabrication of the nanoporous structure has been developed for integration within microelectromechanical systems. The structure is fabricated from a 500?m thick silicon ?100? wafer, which has been etched to provide 4�4mm 2membranes of 50?m thick. Quasi-ordered nanoporous silicon is created within the membrane, the nanopores are of uniform diameter (typical structures of the order of 105 � 5nm) and smooth sidewalls to a depth of ?300nm, in a hexagonal close-packed pattern of 200nm nearest neighbour. The porosity of typical fabricated samples is 31.5%. On the back side of the membrane, a heater and a temperature sensor are incorporated. Three different heater/temperature sensor designs were considered theoretically and the best design was then fabricated and studied experimentally. The results obtained provide both highly ordered nanoporous silicon fabrication methodology as well as evidence that the porous membrane can be heated without deleterious effect. � 2012 IOP Publishing Ltd.en_US
dc.description.natureFinalen_US
dc.identifier.ArtNo85028
dc.identifier.doi10.1088/0960-1317/22/8/085028
dc.identifier.issue8
dc.identifier.scopus2-s2.0-84866327113
dc.identifier.urihttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84866327113&doi=10.1088%2f0960-1317%2f22%2f8%2f085028&partnerID=40&md5=53c6d9f2679ada8deba0e5b77da0ba7a
dc.identifier.urihttps://irepository.uniten.edu.my/handle/123456789/30279
dc.identifier.volume22
dc.sourceScopus
dc.sourcetitleJournal of Micromechanics and Microengineering
dc.subjectDesign
dc.subjectElectromechanical devices
dc.subjectMEMS
dc.subjectPorous silicon
dc.subjectSilicon wafers
dc.subjectTemperature sensors
dc.subjectDeleterious effects
dc.subjectDrug release
dc.subjectFabrication methodology
dc.subjectHexagonal close-packed
dc.subjectIntegrated heater
dc.subjectNano-porous silicon
dc.subjectNanoporous structures
dc.subjectNearest neighbour
dc.subjectPorous membranes
dc.subjectSensor designs
dc.subjectThermally induced
dc.subjectUniform diameter
dc.subjectFabrication
dc.titleDesign and fabrication of a quasi-ordered nanoporous silicon membrane suitable for thermally induced drug releaseen_US
dc.typeArticleen_US
dspace.entity.typePublication
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