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Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications

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dc.citedby8
dc.contributor.authorRalib A.A.M.en_US
dc.contributor.authorNordin A.N.en_US
dc.contributor.authorOthman R.en_US
dc.contributor.authorSalleh H.en_US
dc.contributor.authorid36537608500en_US
dc.contributor.authorid7005958999en_US
dc.contributor.authorid7003407400en_US
dc.contributor.authorid24067645400en_US
dc.date.accessioned2023-12-29T07:48:27Z
dc.date.available2023-12-29T07:48:27Z
dc.date.issued2011
dc.description.abstractEnergy harvesters based on acoustic vibration sources can generate electrical power through piezoelectric transduction. Significant miniaturization of electro mechanical devices using MEMS fabrication technology has encouraged the creation of portable, miniature energy harvesters. A niche application is aero acoustics, where wasted, high dB and high frequency sound generated by aircrafts are transformed into useful energy. Having selfpowered, miniature acoustic sensors allows noise detection monitoring systems to be self-sustaining. This paper illustrates an Aluminium doped Zinc Oxide (AZO) cantilever beam on stainless steel substrate with a top copper electrode. Design and finite element modelling of the design was conducted using CoventorwareTM. The AZO piezoelectric thin film was RF-sputtered on the stainless steel substrate. Characterizations were performed using X-ray diffraction (XRD) and scanning electron microscopy (SEM) to evaluate the piezoelectric qualities and surface morphology, respectively. Experimental measurements indicate approximately 345.4 mV AC output voltage (open circuit voltage) is produced at vibration frequencies of 30 kHz. This is in accordance with the CoventorwareTM simulation results. This measured power level is sufficient to power a miniature wireless acoustic sensor nodes to monitor noise generated by aircrafts. � Springer-Verlag 2011.en_US
dc.description.natureFinalen_US
dc.identifier.doi10.1007/s00542-011-1228-8
dc.identifier.epage573
dc.identifier.issue4
dc.identifier.scopus2-s2.0-79958801886
dc.identifier.spage563
dc.identifier.urihttps://www.scopus.com/inward/record.uri?eid=2-s2.0-79958801886&doi=10.1007%2fs00542-011-1228-8&partnerID=40&md5=00b3a99830d9b0193b4e624ebde02026
dc.identifier.urihttps://irepository.uniten.edu.my/handle/123456789/30492
dc.identifier.volume17
dc.pagecount10
dc.sourceScopus
dc.sourcetitleMicrosystem Technologies
dc.subjectAcoustic devices
dc.subjectDesign
dc.subjectHarvesters
dc.subjectOpen circuit voltage
dc.subjectPiezoelectricity
dc.subjectScanning electron microscopy
dc.subjectSensor nodes
dc.subjectSensors
dc.subjectStainless steel
dc.subjectTelecommunication equipment
dc.subjectX ray diffraction
dc.subjectZinc oxide
dc.subjectAcoustic application
dc.subjectAcoustic Sensors
dc.subjectAcoustic vibration
dc.subjectCopper electrodes
dc.subjectElectrical power
dc.subjectEnergy Harvester
dc.subjectExperimental measurements
dc.subjectFinite element modelling
dc.subjectHigh-frequency sounds
dc.subjectMEMS fabrication
dc.subjectMicrogenerators
dc.subjectMonitoring system
dc.subjectNiche applications
dc.subjectNoise detection
dc.subjectOutput voltages
dc.subjectPiezoelectric thin films
dc.subjectPower levels
dc.subjectSelf-powered
dc.subjectSimulation result
dc.subjectStainless steel substrates
dc.subjectVibration frequency
dc.subjectAcoustic noise
dc.titleDesign, simulation and fabrication of piezoelectric micro generators for aero acoustic applicationsen_US
dc.typeConference paperen_US
dspace.entity.typePublication
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