Publication:
Sputtering thin films: Materials, applications, challenges and future directions

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dc.citedby52
dc.contributor.authorGarg R.en_US
dc.contributor.authorGonuguntla S.en_US
dc.contributor.authorSk S.en_US
dc.contributor.authorIqbal M.S.en_US
dc.contributor.authorDada A.O.en_US
dc.contributor.authorPal U.en_US
dc.contributor.authorAhmadipour M.en_US
dc.contributor.authorid57220823468en_US
dc.contributor.authorid57208838774en_US
dc.contributor.authorid57222470950en_US
dc.contributor.authorid57790840800en_US
dc.contributor.authorid35224436600en_US
dc.contributor.authorid8908351700en_US
dc.contributor.authorid55533484700en_US
dc.date.accessioned2025-03-03T07:42:23Z
dc.date.available2025-03-03T07:42:23Z
dc.date.issued2024
dc.description.abstractSputtering is an effective technique for producing ultrathin films with diverse applications. The review begins by providing an in-depth overview of the background, introducing the early development of sputtering and its principles. Consequently, progress in advancements made in recent decades highlights the renaissance of sputtering as a powerful technology for creating thin films with varied compositions, structures, and properties. For the first time, we have discussed a thorough overview of several sputtered thin film materials based on metal and metal oxide, metal nitride, alloys, carbon, and ceramic-based thin film along with their properties and their applicability in various fields. We further delve into the applications of sputter-coated thin films, specifically emphasizing their relevance in environmental sustainability, energy and electronics, and biomedical fields. We critically examine the recent advancements in developing sputter-coated catalysts for eliminating water pollutants andhydrogen generation. Additionally, the review sheds light on advantages, shortcomings, and future directions for developing sputter-coated thin films utilized in biodegradable metals and alloys with enhanced corrosion resistance and biocompatibility. This review is a comprehensive integration of recent literature, covering diverse sputtering thin film applications. We delve deeply into various material types and emphasize critical analysis of recent advancements, particularly in environmental, energy, and biomedical fields. By offering insights into both advancements and limitations, the review provides a nuanced understanding essential for practical utilization. ? 2023en_US
dc.description.natureFinalen_US
dc.identifier.ArtNo103203
dc.identifier.doi10.1016/j.cis.2024.103203
dc.identifier.scopus2-s2.0-85194475075
dc.identifier.urihttps://www.scopus.com/inward/record.uri?eid=2-s2.0-85194475075&doi=10.1016%2fj.cis.2024.103203&partnerID=40&md5=21123fb651dfcd7a9b62e52e780110b3
dc.identifier.urihttps://irepository.uniten.edu.my/handle/123456789/36431
dc.identifier.volume330
dc.publisherElsevier B.V.en_US
dc.sourceScopus
dc.sourcetitleAdvances in Colloid and Interface Science
dc.subjectBiocompatibility
dc.subjectCorrosion resistance
dc.subjectCorrosion resistant alloys
dc.subjectMedical applications
dc.subjectMetallic films
dc.subjectSputtering
dc.subjectSustainable development
dc.subjectUltrathin films
dc.subjectWater pollution
dc.subjectalloy
dc.subjectcarbon
dc.subjectfuel
dc.subjectmetal oxide
dc.subjectBiomedical applications
dc.subjectBiomedical fields
dc.subjectComposition structure
dc.subjectDiverse applications
dc.subjectEnvironmental energy
dc.subjectMaterial application
dc.subjectSputtering
dc.subjectStructures and properties
dc.subjectThin film material
dc.subjectThin-films
dc.subjectbiocompatibility
dc.subjectcatalyst
dc.subjectceramics
dc.subjectcorrosion
dc.subjectelectronics
dc.subjectenvironmental sustainability
dc.subjecthuman
dc.subjectnonhuman
dc.subjectpharmaceutics
dc.subjectpharmacology
dc.subjectreview
dc.subjectsputter deposition
dc.subjectwater pollutant
dc.subjectFuel cells
dc.titleSputtering thin films: Materials, applications, challenges and future directionsen_US
dc.typeReviewen_US
dspace.entity.typePublication
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