Publication: Investigating the Impact of Deposition Power on PVD Growth WS2 for Solar Cell Application
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Date
2019
Authors
Sobayel K.
Nurhafiza K.
Akhtaruzzaman M.
Ayob A.
Amin N.
Journal Title
Journal ISSN
Volume Title
Publisher
IEEE Computer Society
Abstract
Physical Vapor Deposition (PVD) was used to grow ultra-thin tungsten di sulfide (WS2) layers on top of soda lime glass substrates. Deposition power of radio frequency magnetron sputtering was varied (50W, 100 W, 150 W,200 W and 250 W) to study its impact on film characteristics for suitable application in solar cell. Structural, morphological and opto-electrical properties of as grown film were analyzed. Optimized monocrystalline ultra-thin WS2 films of enhance crystallite (690 nm thick) were successfully hoarded with RF power of 150 W under 100�C temperature. � 2019 IEEE.
Description
Lime; Magnetron sputtering; Physical vapor deposition; Solar cells; Sputtering; Substrates; Sulfur compounds; Thin films; As-grown films; Deposition power; Film characteristics; Monocrystalline; Radio frequency magnetron sputtering; Soda lime glass substrate; Solar-cell applications; Ultra-thin; Tungsten compounds